Antireflecting-chromium linewidth standard, SRM 475, for calibration of optical microscope linewidth measuring systems

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by
U.S. Dept. of Commerce, National Institute of Standards and Technology, Order from National Technical Information Service] , Gaithersburg, MD, [Springfield, VA
Integrated circuits -- Calibration -- Standards., Microscopes -- Calibration -- Standards., Optical measurements -- Stand
Other titlesAntireflecting chromium linewidth standard, SRM 475, for calibration of optical microscope linewidth measuring systems.
StatementCarol F. Vezzetti, Ruth N. Varner, James E. Potzick.
SeriesStandard reference materials, NIST special publication -- 260-117.
ContributionsVarner, Ruth N., Potzick, James E., National Institute of Standards and Technology (U.S.)
The Physical Object
FormatMicroform
Paginationxi, 37 p.
ID Numbers
Open LibraryOL18059817M

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